STUDY OF PHOSPHORUS GETTERING OF GOLD IN SILICON BY USE OF NEUTRON-ACTIVATION ANALYSIS

被引：14

作者：

MURARKA, SP ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1976年 / 123卷 / 05期

关键词：

D O I：

10.1149/1.2132924

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：765 / 767

页数：3

共 26 条

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