SILICON MICROCAVITIES FABRICATED WITH A NEW TECHNIQUE

[1] FABRICATION OF NOVEL 3-DIMENSIONAL MICROSTRUCTURES BY ANISOTROPIC ETCHING OF (100) AND (110) SILICON [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1978, 25 (10) : 1178 - 1185

[2] CHEN CL, 1985, ELECTRON 1223

[3] ETHYLENE DIAMINE-CATECHOL-WATER MIXTURE SHOWS PREFERENTIAL ETCHING OF P-N JUNCTION [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1969, 116 (09) : 1325 - +

[4] GUCKEL H, 1985, 3RD INT C SOL STAT S, P90

[5] HOWE R, 1985, 3RD INT C SOL STAT S, P101

[6] Lasky J. B., 1985, International Electron Devices Meeting. Technical Digest (Cat. No. 85CH2252-5), P684

[7] A BATCH-FABRICATED SILICON CAPACITIVE PRESSURE TRANSDUCER WITH LOW-TEMPERATURE SENSITIVITY [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1982, 29 (01) : 42 - 48

[8] PETERSEN K, 1985, 3RD P INT C SOL STAT, P361

[9] APPLICATION OF PREFERENTIAL ELECTROCHEMICAL ETCHING OF SILICON TO SEMICONDUCTOR DEVICE TECHNOLOGY [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1970, 117 (07) : 959 - +

[10] VUILLEUMIER R, 1984, EUR 84 PAR

[1] FABRICATION OF NOVEL 3-DIMENSIONAL MICROSTRUCTURES BY ANISOTROPIC ETCHING OF (100) AND (110) SILICON [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1978, 25 (10) : 1178 - 1185

[2] CHEN CL, 1985, ELECTRON 1223

[3] ETHYLENE DIAMINE-CATECHOL-WATER MIXTURE SHOWS PREFERENTIAL ETCHING OF P-N JUNCTION [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1969, 116 (09) : 1325 - +

[4] GUCKEL H, 1985, 3RD INT C SOL STAT S, P90

[5] HOWE R, 1985, 3RD INT C SOL STAT S, P101

[6] Lasky J. B., 1985, International Electron Devices Meeting. Technical Digest (Cat. No. 85CH2252-5), P684

[7] A BATCH-FABRICATED SILICON CAPACITIVE PRESSURE TRANSDUCER WITH LOW-TEMPERATURE SENSITIVITY [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1982, 29 (01) : 42 - 48

[8] PETERSEN K, 1985, 3RD P INT C SOL STAT, P361

[9] APPLICATION OF PREFERENTIAL ELECTROCHEMICAL ETCHING OF SILICON TO SEMICONDUCTOR DEVICE TECHNOLOGY [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1970, 117 (07) : 959 - +

[10] VUILLEUMIER R, 1984, EUR 84 PAR