SI DOPANT MIGRATION AND THE ALGAAS/GAAS INVERTED INTERFACE

被引:78
作者
PFEIFFER, L [1 ]
SCHUBERT, EF [1 ]
WEST, KW [1 ]
MAGEE, CW [1 ]
机构
[1] EVANS E INC,PLAINSBORO,NJ 08536
关键词
D O I
10.1063/1.104915
中图分类号
O59 [应用物理学];
学科分类号
摘要
Electron transport in quantum well modulation delta-doped on either the normal or the inverted side has revealed the major cause of the long-puzzling inferior transport characteristics of the inverted interface. For growth conditions optimized for best transport with normal-side doping,we find migration of the Si dopant toward the inverted interface during growth to be the primary reason for the reduced inverted well mobility. This new understanding has allowed us to grow modulation-doped inverted quantum wells of unprecedented quality having electron mobilities as high as 2.4 x 10(6) cm2/V s at 4.2 K and 3.0 x 10(6) cm2/V s at 1.0 K.
引用
收藏
页码:2258 / 2260
页数:3
相关论文
共 10 条
  • [1] REALIZATION OF HIGH MOBILITY IN INVERTED ALXGA1-XAS/GAAS HETEROJUNCTIONS
    CHO, NM
    KIM, DJ
    MADHUKAR, A
    NEWMAN, PG
    SMITH, DD
    AUCOIN, T
    IAFRATE, GJ
    [J]. APPLIED PHYSICS LETTERS, 1988, 52 (24) : 2037 - 2039
  • [2] HEAVY DOPING OF GAAS AND ALGAAS WITH SILICON BY MOLECULAR-BEAM EPITAXY
    HEIBLUM, M
    WANG, WI
    OSTERLING, LE
    DELINE, V
    [J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (11) : 6751 - 6753
  • [3] HEIBLUM M, 1984, APPL PHYS LETT, V44, P1064, DOI 10.1063/1.94644
  • [4] REALIZATION OF HIGH MOBILITIES AT ULTRALOW ELECTRON-DENSITY IN GAAS-AL0.3GA0.7AS INVERTED HETEROJUNCTIONS
    KIM, DJ
    MADHUKAR, A
    HU, KZ
    CHEN, W
    [J]. APPLIED PHYSICS LETTERS, 1990, 56 (19) : 1874 - 1876
  • [5] HIGH-MOBILITY VARIABLE-DENSITY TWO-DIMENSIONAL ELECTRON-GAS IN INVERTED GAAS-ALGAAS HETEROJUNCTIONS
    MEIRAV, U
    HEIBLUM, M
    STERN, F
    [J]. APPLIED PHYSICS LETTERS, 1988, 52 (15) : 1268 - 1270
  • [6] LIGHT-SCATTERING DETERMINATION OF BAND OFFSETS IN GAAS-ALXGA1-XAS QUANTUM-WELLS
    MENENDEZ, J
    PINCZUK, A
    WERDER, DJ
    GOSSARD, AC
    ENGLISH, JH
    [J]. PHYSICAL REVIEW B, 1986, 33 (12): : 8863 - 8866
  • [7] INTERFACIAL PROPERTIES OF (AL,GA)AS/GAAS STRUCTURES - EFFECT OF SUBSTRATE-TEMPERATURE DURING GROWTH BY MOLECULAR-BEAM EPITAXY
    MORKOC, H
    DRUMMOND, TJ
    FISCHER, R
    [J]. JOURNAL OF APPLIED PHYSICS, 1982, 53 (02) : 1030 - 1033
  • [8] ELECTRON MOBILITIES EXCEEDING 107 CM2/V S IN MODULATION-DOPED GAAS
    PFEIFFER, L
    WEST, KW
    STORMER, HL
    BALDWIN, KW
    [J]. APPLIED PHYSICS LETTERS, 1989, 55 (18) : 1888 - 1890
  • [9] USE OF SUPERLATTICES TO REALIZE INVERTED GAAS ALGAAS HETEROJUNCTIONS WITH LOW-TEMPERATURE MOBILITY OF 2X106 CM2/V S
    SAJOTO, T
    SANTOS, M
    HEREMANS, JJ
    SHAYEGAN, M
    HEIBLUM, M
    WECKWERTH, MV
    MEIRAV, U
    [J]. APPLIED PHYSICS LETTERS, 1989, 54 (09) : 840 - 842
  • [10] FERMI-LEVEL-PINNING-INDUCED IMPURITY REDISTRIBUTION IN SEMICONDUCTORS DURING EPITAXIAL-GROWTH
    SCHUBERT, EF
    KUO, JM
    KOPF, RF
    JORDAN, AS
    LUFTMAN, HS
    HOPKINS, LC
    [J]. PHYSICAL REVIEW B, 1990, 42 (02): : 1364 - 1368