THE INFLUENCE OF SOME EVAPORATION PARAMETERS ON THE STRUCTURE AND PROPERTIES OF THIN ALUMINUM FILMS

被引：15

作者：

CURRAN, JE

PAGE, JS

PICK, U

机构：

来源：

关键词：

D O I：

10.1016/0040-6090(82)90460-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：259 / 276

页数：18

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