METALORGANIC CHEMICAL VAPOR-DEPOSITION

被引:139
作者
DAPKUS, PD
机构
来源
ANNUAL REVIEW OF MATERIALS SCIENCE | 1982年 / 12卷
关键词
D O I
10.1146/annurev.ms.12.080182.001331
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:243 / 269
页数:27
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