OBSERVATION OF PSEUDO-DIFFUSION OF NICKEL IN SINGLE-CRYSTAL SILICON BY IN-DEPTH AUGER-ELECTRON SPECTROSCOPY

被引：8

作者：

BERNING, GLP

YOON, KH

LEWIS, G

SINHAROY, S

LEVENSON, LL

机构：

[1] UNIV MISSOURI,GRAD CTR MAT RES,DEPT PHYS,ROLLA,MO 65401

[2] UNIV MISSOURI,DEPT CERAM ENGN,ROLLA,MO 65401

来源：

THIN SOLID FILMS | 1977年 / 45卷 / 01期

关键词：

D O I：

10.1016/0040-6090(77)90215-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：141 / 145

页数：5

相关论文

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