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ELECTRON-BEAM RESISTS FROM LANGMUIR-BLODGETT-FILMS OF POLY(STYRENE MALEIC-ANHYDRIDE) DERIVATIVES
被引:30
作者
:
JONES, R
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV LANCASTER,DEPT CHEM,LANCASTER LA1 4YA,ENGLAND
UNIV LANCASTER,DEPT CHEM,LANCASTER LA1 4YA,ENGLAND
JONES, R
[
1
]
WINTER, CS
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV LANCASTER,DEPT CHEM,LANCASTER LA1 4YA,ENGLAND
UNIV LANCASTER,DEPT CHEM,LANCASTER LA1 4YA,ENGLAND
WINTER, CS
[
1
]
TREDGOLD, RH
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV LANCASTER,DEPT CHEM,LANCASTER LA1 4YA,ENGLAND
UNIV LANCASTER,DEPT CHEM,LANCASTER LA1 4YA,ENGLAND
TREDGOLD, RH
[
1
]
HODGE, P
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV LANCASTER,DEPT CHEM,LANCASTER LA1 4YA,ENGLAND
UNIV LANCASTER,DEPT CHEM,LANCASTER LA1 4YA,ENGLAND
HODGE, P
[
1
]
HOORFAR, A
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV LANCASTER,DEPT CHEM,LANCASTER LA1 4YA,ENGLAND
UNIV LANCASTER,DEPT CHEM,LANCASTER LA1 4YA,ENGLAND
HOORFAR, A
[
1
]
机构
:
[1]
UNIV LANCASTER,DEPT CHEM,LANCASTER LA1 4YA,ENGLAND
来源
:
POLYMER
|
1987年
/ 28卷
/ 10期
关键词
:
D O I
:
10.1016/0032-3861(87)90001-2
中图分类号
:
O63 [高分子化学(高聚物)];
学科分类号
:
070305 ;
080501 ;
081704 ;
摘要
:
引用
收藏
页码:1619 / 1626
页数:8
相关论文
共 19 条
[1]
POLYMERIZED MONO-MOLECULAR LAYERS - A NEW CLASS OF ULTRATHIN RESINS FOR MICROLITHOGRAPHY
BARRAUD, A
论文数:
0
引用数:
0
h-index:
0
BARRAUD, A
ROSILIO, C
论文数:
0
引用数:
0
h-index:
0
ROSILIO, C
RUAUDELTEIXIER, A
论文数:
0
引用数:
0
h-index:
0
RUAUDELTEIXIER, A
[J].
THIN SOLID FILMS,
1980,
68
(01)
: 91
-
98
[2]
SOLID-STATE ELECTRON-INDUCED POLYMERIZATION OF OMEGA-TRICOSENOIC ACID MULTILAYERS
BARRAUD, A
论文数:
0
引用数:
0
h-index:
0
机构:
CENS,F-91190 GIF SUR YVETTE,FRANCE
CENS,F-91190 GIF SUR YVETTE,FRANCE
BARRAUD, A
ROSILIO, C
论文数:
0
引用数:
0
h-index:
0
机构:
CENS,F-91190 GIF SUR YVETTE,FRANCE
CENS,F-91190 GIF SUR YVETTE,FRANCE
ROSILIO, C
RUAUDELTEIXIER, A
论文数:
0
引用数:
0
h-index:
0
机构:
CENS,F-91190 GIF SUR YVETTE,FRANCE
CENS,F-91190 GIF SUR YVETTE,FRANCE
RUAUDELTEIXIER, A
[J].
JOURNAL OF COLLOID AND INTERFACE SCIENCE,
1977,
62
(03)
: 509
-
523
[3]
POLYMERIZATION IN LANGMUIR-BLODGETT FILMS AND RESIST APPLICATIONS
BARRAUD, A
论文数:
0
引用数:
0
h-index:
0
BARRAUD, A
[J].
THIN SOLID FILMS,
1983,
99
(1-3)
: 317
-
321
[4]
SUB-20-NM-WIDE METAL LINES BY ELECTRON-BEAM EXPOSURE OF THIN POLY(METHYL METHACRYLATE) FILMS AND LIFTOFF
BEAUMONT, SP
论文数:
0
引用数:
0
h-index:
0
BEAUMONT, SP
BOWER, PG
论文数:
0
引用数:
0
h-index:
0
BOWER, PG
TAMAMURA, T
论文数:
0
引用数:
0
h-index:
0
TAMAMURA, T
WILKINSON, CDW
论文数:
0
引用数:
0
h-index:
0
WILKINSON, CDW
[J].
APPLIED PHYSICS LETTERS,
1981,
38
(06)
: 436
-
439
[5]
Bowden M J, 1979, CRC CRIT R SOLID ST, V8, P223
[6]
BOWDEN MJ, 1981, J ELECTROCHEM SOC, pC195
[7]
RAPID WRITING OF FINE LINES IN LANGMUIR-BLODGETT FILMS USING ELECTRON-BEAMS
BROERS, AN
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
BROERS, AN
POMERANTZ, M
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
POMERANTZ, M
[J].
THIN SOLID FILMS,
1983,
99
(1-3)
: 323
-
329
[8]
Brown A. G., 1985, Microelectronic Engineering, V3, P443, DOI 10.1016/0167-9317(85)90055-3
[9]
10-NM LINEWIDTH ELECTRON-BEAM LITHOGRAPHY ON GAAS
CRAIGHEAD, HG
论文数:
0
引用数:
0
h-index:
0
CRAIGHEAD, HG
HOWARD, RE
论文数:
0
引用数:
0
h-index:
0
HOWARD, RE
JACKEL, LD
论文数:
0
引用数:
0
h-index:
0
JACKEL, LD
MANKIEWICH, PM
论文数:
0
引用数:
0
h-index:
0
MANKIEWICH, PM
[J].
APPLIED PHYSICS LETTERS,
1983,
42
(01)
: 38
-
40
[10]
ELECTRON-BEAM RESISTS PRODUCED FROM MONOMER-POLYMER LANGMUIR-BLODGETT FILMS
FARISS, G
论文数:
0
引用数:
0
h-index:
0
FARISS, G
LANDO, J
论文数:
0
引用数:
0
h-index:
0
LANDO, J
RICKERT, S
论文数:
0
引用数:
0
h-index:
0
RICKERT, S
[J].
THIN SOLID FILMS,
1983,
99
(1-3)
: 305
-
315
←
1
2
→
共 19 条
[1]
POLYMERIZED MONO-MOLECULAR LAYERS - A NEW CLASS OF ULTRATHIN RESINS FOR MICROLITHOGRAPHY
BARRAUD, A
论文数:
0
引用数:
0
h-index:
0
BARRAUD, A
ROSILIO, C
论文数:
0
引用数:
0
h-index:
0
ROSILIO, C
RUAUDELTEIXIER, A
论文数:
0
引用数:
0
h-index:
0
RUAUDELTEIXIER, A
[J].
THIN SOLID FILMS,
1980,
68
(01)
: 91
-
98
[2]
SOLID-STATE ELECTRON-INDUCED POLYMERIZATION OF OMEGA-TRICOSENOIC ACID MULTILAYERS
BARRAUD, A
论文数:
0
引用数:
0
h-index:
0
机构:
CENS,F-91190 GIF SUR YVETTE,FRANCE
CENS,F-91190 GIF SUR YVETTE,FRANCE
BARRAUD, A
ROSILIO, C
论文数:
0
引用数:
0
h-index:
0
机构:
CENS,F-91190 GIF SUR YVETTE,FRANCE
CENS,F-91190 GIF SUR YVETTE,FRANCE
ROSILIO, C
RUAUDELTEIXIER, A
论文数:
0
引用数:
0
h-index:
0
机构:
CENS,F-91190 GIF SUR YVETTE,FRANCE
CENS,F-91190 GIF SUR YVETTE,FRANCE
RUAUDELTEIXIER, A
[J].
JOURNAL OF COLLOID AND INTERFACE SCIENCE,
1977,
62
(03)
: 509
-
523
[3]
POLYMERIZATION IN LANGMUIR-BLODGETT FILMS AND RESIST APPLICATIONS
BARRAUD, A
论文数:
0
引用数:
0
h-index:
0
BARRAUD, A
[J].
THIN SOLID FILMS,
1983,
99
(1-3)
: 317
-
321
[4]
SUB-20-NM-WIDE METAL LINES BY ELECTRON-BEAM EXPOSURE OF THIN POLY(METHYL METHACRYLATE) FILMS AND LIFTOFF
BEAUMONT, SP
论文数:
0
引用数:
0
h-index:
0
BEAUMONT, SP
BOWER, PG
论文数:
0
引用数:
0
h-index:
0
BOWER, PG
TAMAMURA, T
论文数:
0
引用数:
0
h-index:
0
TAMAMURA, T
WILKINSON, CDW
论文数:
0
引用数:
0
h-index:
0
WILKINSON, CDW
[J].
APPLIED PHYSICS LETTERS,
1981,
38
(06)
: 436
-
439
[5]
Bowden M J, 1979, CRC CRIT R SOLID ST, V8, P223
[6]
BOWDEN MJ, 1981, J ELECTROCHEM SOC, pC195
[7]
RAPID WRITING OF FINE LINES IN LANGMUIR-BLODGETT FILMS USING ELECTRON-BEAMS
BROERS, AN
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
BROERS, AN
POMERANTZ, M
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
POMERANTZ, M
[J].
THIN SOLID FILMS,
1983,
99
(1-3)
: 323
-
329
[8]
Brown A. G., 1985, Microelectronic Engineering, V3, P443, DOI 10.1016/0167-9317(85)90055-3
[9]
10-NM LINEWIDTH ELECTRON-BEAM LITHOGRAPHY ON GAAS
CRAIGHEAD, HG
论文数:
0
引用数:
0
h-index:
0
CRAIGHEAD, HG
HOWARD, RE
论文数:
0
引用数:
0
h-index:
0
HOWARD, RE
JACKEL, LD
论文数:
0
引用数:
0
h-index:
0
JACKEL, LD
MANKIEWICH, PM
论文数:
0
引用数:
0
h-index:
0
MANKIEWICH, PM
[J].
APPLIED PHYSICS LETTERS,
1983,
42
(01)
: 38
-
40
[10]
ELECTRON-BEAM RESISTS PRODUCED FROM MONOMER-POLYMER LANGMUIR-BLODGETT FILMS
FARISS, G
论文数:
0
引用数:
0
h-index:
0
FARISS, G
LANDO, J
论文数:
0
引用数:
0
h-index:
0
LANDO, J
RICKERT, S
论文数:
0
引用数:
0
h-index:
0
RICKERT, S
[J].
THIN SOLID FILMS,
1983,
99
(1-3)
: 305
-
315
←
1
2
→