A COMBINED HIGH-RESOLUTION ELECTRON-MICROSCOPY, X-RAY PHOTOEMISSION SPECTROSCOPY, AND ELECTRICAL-PROPERTIES STUDY OF THE INP-SIO2 INTERFACE

被引:14
作者
KRIVANEK, OL
LILIENTAL, Z
WAGER, JF
GAN, RG
GOODNICK, SM
WILMSEN, CW
机构
[1] ARIZONA STATE UNIV,DEPT PHYS,TEMPE,AZ 85287
[2] OREGON STATE UNIV,DEPT ELECT & COMP ENGN,CORVALLIS,OR 97331
[3] COLORADO STATE UNIV,DEPT ELECT ENGN,FT COLLINS,CO 80523
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1985年 / 3卷 / 04期
关键词
D O I
10.1116/1.583056
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:1081 / 1086
页数:6
相关论文
共 22 条
[1]   COMBINED HREM AND STEM MICROANALYSIS ON DECORATED DISLOCATION CORES [J].
BOURRET, A ;
COLLIEX, C .
ULTRAMICROSCOPY, 1982, 9 (03) :183-189
[2]   THE PREPARATION OF CROSS-SECTION SPECIMENS FOR TRANSMISSION ELECTRON-MICROSCOPY [J].
BRAVMAN, JC ;
SINCLAIR, R .
JOURNAL OF ELECTRON MICROSCOPY TECHNIQUE, 1984, 1 (01) :53-61
[3]   IMPROVEMENTS IN GAAS PLASMA-DEPOSITED SILICON-NITRIDE INTERFACE QUALITY BY PRE-DEPOSITION GAAS SURFACE-TREATMENT AND POST-DEPOSITION ANNEALING [J].
CLARK, MD ;
ANDERSON, CL .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (02) :453-456
[4]   INP-SIO2 MIS STRUCTURE WITH REDUCED INTERFACE STATE DENSITY NEAR CONDUCTION-BAND [J].
FRITZSCHE, D .
ELECTRONICS LETTERS, 1978, 14 (03) :51-52
[5]   ELECTRON-TRANSPORT IN INVERSION AND ACCUMULATION LAYERS OF III-V-COMPOUNDS [J].
GOODNICK, SM ;
FERRY, DK .
THIN SOLID FILMS, 1983, 103 (1-2) :27-46
[6]   HIGH-RESOLUTION IMAGING OF THE INTERFACIAL REGION IN METAL-INSULATOR-SEMICONDUCTOR AND SCHOTTKY DIODES [J].
GREEN, MA ;
BLAKERS, AW ;
KRIVANEK, OL .
JOURNAL OF APPLIED PHYSICS, 1983, 54 (05) :2885-2887
[7]   MICROANALYSIS OF LIGHT-ELEMENTS USING TRANSMITTED ENERGY-LOSS ELECTRONS [J].
ISAACSON, M ;
JOHNSON, D .
ULTRAMICROSCOPY, 1975, 1 (01) :33-52
[8]   ION-BEAM MILLING OF INP WITH AN AR/O2-GAS MIXTURE [J].
KATZSCHNER, W ;
STECKENBORN, A ;
LOFFLER, R ;
GROTE, N .
APPLIED PHYSICS LETTERS, 1984, 44 (03) :352-354
[9]   HREM IMAGING AND MICROANALYSIS OF A III-V SEMICONDUCTOR OXIDE INTERFACE [J].
KRIVANEK, OL ;
FORTNER, SL .
ULTRAMICROSCOPY, 1984, 14 (1-2) :121-126
[10]  
KRIVANEK OL, 1978, PHYSICS SIO2 ITS INT, P356