QUANTITATIVE NONDESTRUCTIVE IN-DEPTH COMPOSITION INFORMATION FROM XPS

被引：58

作者：

TOUGAARD, S

机构：

来源：

SURFACE AND INTERFACE ANALYSIS | 1986年 / 8卷 / 06期

关键词：

D O I：

10.1002/sia.740080607

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：257 / 260

页数：4

共 28 条

[1] DEPTH RESOLUTION OF SPUTTER PROFILING [J].

ANDERSEN, HH .

APPLIED PHYSICS, 1979, 18 (02) :131-140

[2]

ANDERSEN HH, 1981, TOP APPL PHYS, V47, P145, DOI [10.1007/3540105212_9, DOI 10.1007/3540105212_9]

[3] STRAGGLING AND PLASMON EXCITATION IN THE ENERGY-LOSS SPECTRA OF ELECTRONS TRANSMITTED THROUGH CARBON [J].

ASHLEY, JC ;

COWAN, JJ ;

RITCHIE, RH ;

ANDERSON, VE ;

HOELZL, J .

THIN SOLID FILMS, 1979, 60 (03) :361-370

[4]

BRIGGS D, 1983, PRACTICAL SURFACE AN

[5] THE EFFECTS OF ELASTIC BACKSCATTERING ON THE AUGER OR X-RAY PHOTOELECTRON-SPECTRA OF SOLIDS [J].

DWYER, VM ;

MATTHEW, JAD .

SURFACE SCIENCE, 1984, 143 (01) :57-83

[6] DETERMINATION OF REDUCED THICKNESS D-LAMBDA OF THIN-LAYERS BY MEANS OF X-RAY PHOTOELECTRON-SPECTROSCOPY [J].

EBEL, MF .

JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1978, 14 (04) :287-322

[7]

HOFFMAN S, 1980, SURFACE INTERFACE AN, V2, P148

[8] EFFECTS OF ELASTIC PHOTOELECTRON COLLISIONS IN QUANTITATIVE XPS [J].

JABLONSKI, A ;

EBEL, H .

SURFACE AND INTERFACE ANALYSIS, 1984, 6 (01) :21-28

[9] AN IMPORTANT STEP IN QUANTITATIVE AUGER ANALYSIS - THE USE OF PEAK TO BACKGROUND RATIO [J].

LANGERON, JP ;

MINEL, L ;

VIGNES, JL ;

BOUQUET, S ;

PELLERIN, F ;

LORANG, G ;

AILLOUD, P ;

LEHERICY, J .

SURFACE SCIENCE, 1984, 138 (2-3) :610-628

[10] FITTING THE INELASTIC TAIL BELOW EXPERIMENTALLY OBSERVED AUGER PEAKS [J].

PEACOCK, DC .

SURFACE SCIENCE, 1985, 152 (APR) :895-901

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