EFFECT OF MIXING OXYGEN OR DIBORANE ON THE FORMATION OF AMORPHOUS-CARBON FILMS FROM METHANE BY RF PLASMA CHEMICAL VAPOR-DEPOSITION

被引：2

作者：

AIYER, CR

GANGAL, SA

MONTASSER, K

MORITA, S

HATTORI, S

机构：

[1] Nagoya Univ, Japan

来源：

THIN SOLID FILMS | 1988年 / 163卷

关键词：

D O I：

10.1016/0040-6090(88)90427-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：229 / 232

页数：4

共 18 条

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