AN EXPERIMENTAL-STUDY OF A PARALLEL-PLATE RADIO-FREQUENCY DISCHARGE - MEASUREMENTS OF THE RADIATION TEMPERATURE AND ELECTRON-DENSITY

被引：43

作者：

HEBNER, GA ^{[1
]}

VERDEYEN, JT ^{[1
]}

KUSHNER, MJ ^{[1
]}

机构：

[1] UNIV ILLINOIS,GASEOUS ELECTR LAB,CHAMPAIGN,IL 61820

来源：

关键词：

D O I：

10.1063/1.341060

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2226 / 2236

页数：11

共 32 条

[11] BASIC CHEMISTRY AND MECHANISMS OF PLASMA-ETCHING
FLAMM, DL
DONNELLY, VM
IBBOTSON, DE
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (01): : 23 - 30
[12] NOTES ON EFFECT OF NOISE ON LANGMUIR PROBE CHARACTERISTICS
GARSCADDEN, A
EMELEUS, KG
[J]. PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON, 1962, 79 (509): : 535 - &
[13] GILARDINI A, 1972, LOW ENERGY COLLISION, P233
[14] ION-BOMBARDMENT SECONDARY-ELECTRON MAINTENANCE OF STEADY RF DISCHARGE
GODYAK, VA
KHANNEH, AS
[J]. IEEE TRANSACTIONS ON PLASMA SCIENCE, 1986, 14 (02) : 112 - 123
[15] GODYAK VA, 1986, SOVIET RADIO FREQUEN, P118
[16] FLUID MODEL SIMULATIONS OF A 13.56-MHZ RF DISCHARGE - TIME AND SPACE DEPENDENCE OF RATES OF ELECTRON-IMPACT EXCITATION
GRAVES, DB
[J]. JOURNAL OF APPLIED PHYSICS, 1987, 62 (01) : 88 - 94
[17] A CONTINUUM MODEL OF DC AND RF DISCHARGES
GRAVES, DB
JENSEN, KF
[J]. IEEE TRANSACTIONS ON PLASMA SCIENCE, 1986, 14 (02) : 78 - 91
[18] HEALD MA, 1965, PLASMA DIAGNOSTICS M, P117
[19] THE SPATIAL AND TEMPORAL EVOLUTION OF THE GLOW IN AN RF DISCHARGE
HEBNER, GA
VERDEYEN, JT
[J]. IEEE TRANSACTIONS ON PLASMA SCIENCE, 1986, 14 (02) : 132 - 136
[20] HEBNER GA, 1987, B AM PHYS SOC, V32, P1148