AN INVESTIGATION OF OXYGEN INDIFFUSION DURING LASER CLEANING ANNEALING OF SILICON BY MEANS OF THE O-16(ALPHA,ALPH-O)O-16 RESONANCE SCATTERING

被引：26

作者：

WANG, ZL

WESTENDORP, JFM

SARIS, FW

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 211卷 / 01期

关键词：

D O I：

10.1016/0167-5087(83)90569-0

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：193 / 201

页数：9

共 33 条

[1] 7ICROANALYSIS BY DIRECT OBSERVATION OF NUCLEAR REACTIONS USING A 2 MEV VAN-DE-GRAAFF [J].

AMSEL, G ;

NADAI, JP ;

DARTEMAR.E ;

DAVID, D ;

GIRARD, E ;

MOULIN, J .

NUCLEAR INSTRUMENTS & METHODS, 1971, 92 (04) :481-&

[2] ATOMICALLY CLEAN SURFACES BY PULSED LASER BOMBARDMENT [J].

BEDAIR, SM ;

SMITH, HP .

JOURNAL OF APPLIED PHYSICS, 1969, 40 (12) :4776-&

[3] ELASTIC SCATTERING OF ALPHA-PARTICLES BY OXYGEN [J].

CAMERON, JR .

PHYSICAL REVIEW, 1953, 90 (05) :839-844

[4] EROSION OF MATERIALS IN MOLTEN SILICON [J].

CHANEY, RE ;

VARKER, CJ .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (06) :846-852

[5] DISSOLUTION OF FUSED SILICA IN MOLTEN SILICON [J].

CHANEY, RE ;

VARKER, CJ .

JOURNAL OF CRYSTAL GROWTH, 1976, 33 (01) :188-190

[6] PRINCIPLES AND APPLICATIONS OF ION-BEAM TECHNIQUES FOR ANALYSIS OF SOLIDS AND THIN-FILMS [J].

CHU, WK ;

MAYER, JW ;

NICOLET, MA ;

BUCK, TM ;

AMSEL, G ;

EISEN, F .

THIN SOLID FILMS, 1973, 17 (01) :1-41

[7]

Chu WK., 1978, BACKSCATTERING SPECT

[8]

CROSET M, 1973, J ELECTROCHEM SOC, V120, P536

[9]

DECONNINCK G, 1981, NUCL INSTR METH, V180, P87

[10]

DEJONG T, 1981, P MRS BOSTON, V1, P215

← 1 2 3 4 →