ASSESSMENT OF THE EXTENT OF ATOMIC MIXING FROM SPUTTERING EXPERIMENTS

[11] THEORETICAL ASPECTS OF ATOMIC MIXING BY ION-BEAMS [J]. NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR): : 25 - 41

[12] ION-BEAM-INDUCED SILICIDE FORMATION [J]. APPLIED PHYSICS LETTERS, 1979, 34 (02) : 168 - 170

[13] VONDERWEG WF, 1974, APPLICATIONS ION BEA, P209

[14] Werner H. W., 1980, Surface and Interface Analysis, V2, P56, DOI 10.1002/sia.740020205

[15] ANOMALOUS SPUTTER YIELDS DUE TO CASCADE MIXING [J]. APPLIED PHYSICS LETTERS, 1980, 36 (09) : 758 - 760

[16] Winterbon K. B., 1972, Radiation Effects, V13, P215, DOI 10.1080/00337577208231183

[17] INFLUENCE OF ALTERED LAYER ON DEPTH PROFILING MEASUREMENTS [J]. APPLIED PHYSICS LETTERS, 1976, 28 (04) : 176 - 179

[18] PROJECTILE-ENERGY DEPENDENCE OF COMPOSITIONAL CHANGES PRODUCED IN SPUTTERING OF A DILUTE SI(FE,W) ALLOY [J]. NUCLEAR INSTRUMENTS & METHODS, 1980, 170 (1-3): : 331 - 335

[11] THEORETICAL ASPECTS OF ATOMIC MIXING BY ION-BEAMS [J]. NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR): : 25 - 41

[12] ION-BEAM-INDUCED SILICIDE FORMATION [J]. APPLIED PHYSICS LETTERS, 1979, 34 (02) : 168 - 170

[13] VONDERWEG WF, 1974, APPLICATIONS ION BEA, P209

[14] Werner H. W., 1980, Surface and Interface Analysis, V2, P56, DOI 10.1002/sia.740020205

[15] ANOMALOUS SPUTTER YIELDS DUE TO CASCADE MIXING [J]. APPLIED PHYSICS LETTERS, 1980, 36 (09) : 758 - 760

[16] Winterbon K. B., 1972, Radiation Effects, V13, P215, DOI 10.1080/00337577208231183

[17] INFLUENCE OF ALTERED LAYER ON DEPTH PROFILING MEASUREMENTS [J]. APPLIED PHYSICS LETTERS, 1976, 28 (04) : 176 - 179

[18] PROJECTILE-ENERGY DEPENDENCE OF COMPOSITIONAL CHANGES PRODUCED IN SPUTTERING OF A DILUTE SI(FE,W) ALLOY [J]. NUCLEAR INSTRUMENTS & METHODS, 1980, 170 (1-3): : 331 - 335