SURFACE CHARACTERIZATION OF LEC SI-GAAS USING PHOTOREFLECTANCE WITH SUB-BANDGAP EXCITATION

被引:7
作者
BHIMNATHWALA, H
BORREGO, JM
机构
[1] Center for Integrated Electronics, Electrical Computer and Systems Engineering Department, Rensselaer Polytechnic Institute, Troy
关键词
D O I
10.1016/0038-1101(92)90091-P
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A novel variation of photoreflectance, where the modulating beam has a photon energy that is smaller than the bandgap of the semiconductor, has been performed on SI-LEC grown Gallium Arsenide to study its surface properties. Analysis shows that the surface electric field created upon the application of the above light is sensitive to surface states and relatively insensitive to the bulk properties. The effect of various chemical treatments on the surface state density of GaAs is measured. Spectral features at energies smaller than the gap energy are observed and are assigned to shallow impurities. A mechanism for modulation of impurity absorption has been proposed.
引用
收藏
页码:1503 / 1511
页数:9
相关论文
共 25 条
[1]  
AKRAM SA, IN PRESS
[2]  
ASPENS DE, 1972, PHYS REV LETT, V28, P913
[3]   EFFECT OF BACK-SURFACE REFLECTION ON THE ELECTROREFLECTANCE SPECTRA OF GAAS [J].
BEHN, U ;
ROPPISCHER, H .
PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1987, 141 (01) :325-332
[4]  
BHIMNATHWALA HG, IN PRESS
[5]   NONDESTRUCTIVE LIFETIME MEASUREMENT IN SILICON-WAFERS BY MICROWAVE REFLECTION [J].
BORREGO, JM ;
GUTMANN, RJ ;
JENSEN, N .
SOLID-STATE ELECTRONICS, 1987, 30 (02) :195-203
[6]  
BOTHRA S, 1987, 19TH P IEEE PHOT SPE, P261
[7]   CORRELATION BETWEEN THE PHOTOREFLECTANCE IMPURITY PEAK IN SEMI-INSULATING GAAS AND THE BULK ACCEPTOR CONCENTRATION [J].
BRIERLEY, SK ;
LEHR, DS .
JOURNAL OF APPLIED PHYSICS, 1990, 67 (08) :3878-3880
[8]   EXISTENCE OF CONGRUENT-TO 64-MEV DEEP ACCEPTOR IN SE-IMPLANTED GAAS AFTER CLOSE-CONTACT ANNEALING [J].
DANSAS, P ;
CHARLEC, JP .
JOURNAL OF APPLIED PHYSICS, 1984, 55 (10) :3617-3623
[9]   PHOTOREFLECTANCE SURFACE FERMI LEVEL MEASUREMENTS OF GAAS SUBJECTED TO VARIOUS CHEMICAL TREATMENTS [J].
GASKILL, DK ;
BOTTKA, N ;
SILLMON, RS .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (05) :1497-1501
[10]   EFFECTS OF IMPURITY TRANSITIONS ON ELECTROREFLECTANCE IN THIN EPITAXIAL GAAS AND GA1-XALXAS/GAAS LAYERS [J].
GLEMBOCKI, OJ ;
BOTTKA, N ;
FURNEAUX, JE .
JOURNAL OF APPLIED PHYSICS, 1985, 57 (02) :432-437