DIFFUSION OF DONOR ELEMENTS (SB-125, P-32, AS-74(73)) IN POLYCRYSTALLINE SILICON

被引：11

作者：

SPIT, FHM

BAKKER, H

机构：

[1] Univ van Amsterdam, Amsterdam, Neth, Univ van Amsterdam, Amsterdam, Neth

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1986年 / 97卷 / 01期

关键词：

D O I：

10.1002/pssa.2210970111

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

SEMICONDUCTING SILICON

引用

页码：135 / 142

页数：8

共 35 条

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