A NEW PROFILING TECHNIQUE APPLICABLE TO THE MEASUREMENTS SENSITIVE TO THE FREE-CARRIER CONCENTRATION RATHER THAN THE DEPLETION-LAYER THICKNESS

被引：7

作者：

DAVARI, B

DAS, P

机构：

来源：

IEEE ELECTRON DEVICE LETTERS | 1983年 / 4卷 / 06期

关键词：

D O I：

10.1109/EDL.1983.25693

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：169 / 172

页数：4

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