MODIFICATION OF SOLID-SURFACE BY INTENSE PULSED LIGHT-ION AND METAL-ION BEAMS

被引：14

作者：

NAKAGAWA, Y

ARIYOSHI, T

HANJO, H

TSUTSUMI, S

FUJII, Y

ITAMI, M

OKAMOTO, A

OGAWA, S

HAMADA, T

FUKUMARU, F

机构：

[1] OSAKA MUNICIPAL TECH RES INST,OSAKA 536,JAPAN

[2] IND TECHNOL RES INST OSAKA PREFECTURE,OSAKA 550,JAPAN

[3] NISSIN ELECT CO LTD,KYOTO 615,JAPAN

[4] OSAKA CITY UNIV,FAC ENGN,OSAKA 558,JAPAN

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 39卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(89)90857-4

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：603 / 606

页数：4

共 10 条

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