DIRECT AND ACCURATE MEASUREMENT OF ETCH RATE OF POLYMER-FILMS UNDER FAR-UV IRRADIATION

被引：48

作者：

LAZARE, S

SOULIGNAC, JC

FRAGNAUD, P

机构：

来源：

APPLIED PHYSICS LETTERS | 1987年 / 50卷 / 10期

关键词：

D O I：

10.1063/1.98101

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：624 / 625

页数：2

共 12 条

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[2]

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[3] SURFACE-PROPERTIES OF POLY(ETHYLENE-TEREPHTHALATE) FILMS MODIFIED BY FAR-ULTRAVIOLET RADIATION AT 193-NM (LASER) AND 185-NM (LOW INTENSITY) [J].

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SRINIVASAN, R .

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[4]

LU CS, 1984, APPLICATIONS PIEZOEL

[5]

Muller D., 1986, Lasers & Applications, V5, P85

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PHILIPP, HR ;

COLE, HS ;

LIU, YS ;

SITNIK, TA .

APPLIED PHYSICS LETTERS, 1986, 48 (02) :192-194

[7] ABLATIVE PHOTODECOMPOSITION OF POLYMER-FILMS BY PULSED FAR-ULTRAVIOLET (193 NM) LASER-RADIATION - DEPENDENCE OF ETCH DEPTH ON EXPERIMENTAL CONDITIONS [J].

SRINIVASAN, R ;

BRAREN, B .

JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 1984, 22 (10) :2601-2609

[8] KINETICS OF THE ABLATIVE PHOTO-DECOMPOSITION OF ORGANIC POLYMERS IN THE FAR ULTRAVIOLET (193 NM) [J].

SRINIVASAN, R .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (04) :923-926

[9] SELF-DEVELOPING PHOTOETCHING OF POLY(ETHYLENE-TEREPHTHALATE) FILMS BY FAR ULTRAVIOLET EXCIMER LASER-RADIATION [J].

SRINIVASAN, R ;

MAYNEBANTON, V .

APPLIED PHYSICS LETTERS, 1982, 41 (06) :576-578

[10] EXCIMER LASER ETCHING OF POLYMERS [J].

SRINIVASAN, V ;

SMRTIC, MA ;

BABU, SV .

JOURNAL OF APPLIED PHYSICS, 1986, 59 (11) :3861-3867

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