CONDUCTIVITY IMAGING OF THE EROSION PATTERN FOR ZNO PREPARED BY PLANAR RF MAGNETRON SPUTTERING

被引：48

作者：

WEBB, JB

机构：

来源：

THIN SOLID FILMS | 1986年 / 136卷 / 01期

关键词：

D O I：

10.1016/0040-6090(86)90116-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：135 / 139

页数：5

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