共 11 条
[2]
SPUTTER-INDUCED ROUGHNESS IN THERMAL SIO2 DURING AUGER SPUTTER PROFILING STUDIES OF THE SI-SIO2 INTERFACE
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1980, 17 (01)
:44-46
[5]
MCCAUGHAN DV, 1974, CHARACTERIZATION SOL, P627
[7]
RAO BB, 1983, UNPUB 7TH ANN C EL D