EFFECT OF APPLIED EXTERNAL MAGNETIC-FIELD ON THE RELATIONSHIP BETWEEN THE ARRANGEMENT OF THE SUBSTRATE AND THE RESISTIVITY OF ALUMINUM-DOPED ZNO THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING

被引：67

作者：

MINAMI, T

NANTO, H

SATO, H

TAKATA, S

机构：

[1] Kanazawa Inst of Technology, Japan

来源：

THIN SOLID FILMS | 1988年 / 164卷

关键词：

We would like to thank S. Shooji; S. Tamaki and K. Yamaguchi for their technical assistance in the experiments. The research reported in this paper was partly supported by Grant-in-Aid for Scientific Research No. 60550014 from the Ministry of Education; Science and Culture of Japan;

D O I：

10.1016/0040-6090(88)90149-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：275 / 279

页数：5

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[7] INFLUENCE OF ENERGETIC OXYGEN BOMBARDMENT ON CONDUCTIVE ZNO FILMS
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