MELT-INTERFACE MECHANISM FOR GENERATION OF SILICON-CARBIDE MICRODEFECTS IN SILICON

被引:19
作者
KALEJS, JP [1 ]
CHALMERS, B [1 ]
机构
[1] HARVARD UNIV,CAMBRIDGE,MA 02138
关键词
D O I
10.1016/0022-0248(86)90481-1
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
引用
收藏
页码:487 / 492
页数:6
相关论文
共 15 条
[1]  
AST DG, 1985, SILICON PROCESSING P, V1, pCH7
[2]  
CRETELLA MC, UNPUB
[3]   THE EFFECT OF DOPING ON THE FORMATION OF SWIRL DEFECTS IN DISLOCATION-FREE CZOCHRALSKI-GROWN SILICON-CRYSTALS [J].
DEKOCK, AJR ;
VANDEWIJGERT, WM .
JOURNAL OF CRYSTAL GROWTH, 1980, 49 (04) :718-734
[4]   MICRODEFECTS IN SILICON AND THEIR RELATION TO POINT-DEFECTS [J].
FOLL, H ;
GOSELE, U ;
KOLBESEN, BO .
JOURNAL OF CRYSTAL GROWTH, 1981, 52 (APR) :907-916
[5]  
GLEICHMANN R, 1985, IMPURITY DIFFUSION G, V36, P181
[6]   OSTWALD RIPENING AND ITS APPLICATION TO PRECIPITATES AND COLLOIDS IN IONIC-CRYSTALS AND GLASSES [J].
JAIN, SC ;
HUGHES, AE .
JOURNAL OF MATERIALS SCIENCE, 1978, 13 (08) :1611-1631
[7]  
Jepps N. W., 1983, Progress in Crystal Growth and Characterization, V7, P259, DOI 10.1016/0146-3535(83)90034-5
[8]   INFLUENCE OF HIGH-TEMPERATURE ANNEALING ON PERFORMANCE OF EDGE-DEFINED FILM-FED GROWTH-SILICON RIBBON SOLAR-CELLS [J].
KALEJS, JP ;
LADD, LA .
APPLIED PHYSICS LETTERS, 1984, 45 (05) :540-542
[9]  
KALEJS JP, 1980, ELECTRONIC OPTICAL P, P242
[10]   CARBON IN SILICON - PROPERTIES AND IMPACT ON DEVICES [J].
KOLBESEN, BO ;
MUHLBAUER, A .
SOLID-STATE ELECTRONICS, 1982, 25 (08) :759-775