EXTENDED BULK DEFECTS INDUCED BY LOW-ENERGY IONS DURING PARTIALLY IONIZED BEAM DEPOSITION

被引：7

作者：

LEE, WI

WONG, J

BORREGO, JM

LU, TM

机构：

[1] RENSSELAER POLYTECH INST,DEPT PHYS,TROY,NY 12181

[2] RENSSELAER POLYTECH INST,DEPT ELECT COMP & SYST ENGN,TROY,NY 12181

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 04期

关键词：

D O I：

10.1063/1.341683

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2206 / 2208

页数：3

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