ROLE OF IMPURITIES IN FORMATION OF QUENCHED-IN RECOMBINATION CENTERS IN THERMALLY TREATED SILICON

被引:8
作者
GLINCHUK, KD [1 ]
LITOVCHENKO, NM [1 ]
MERKER, R [1 ]
机构
[1] ACAD SCI UKSSR,SEMICOND INST,KIEV,UKSSR
来源
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1976年 / 33卷 / 02期
关键词
D O I
10.1002/pssa.2210330245
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:K87 / K90
页数:4
相关论文
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