AlGaInP LEDs using reactive thermally evaporated transparent conducting indium tin oxide (ITO)

被引:32
作者
Aliyu, YH [1 ]
Morgan, DV [1 ]
Thomas, H [1 ]
Bland, SW [1 ]
机构
[1] EPITAXIAL PROD INT LTD,CARDIFF CF3 0EG,S GLAM,WALES
关键词
light emitting diodes; indium tin oxide;
D O I
10.1049/el:19951520
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Reactive thermally evaporated transparent conducting indium tin oxide (ITO) layers are used as window material and for current spreading layers on AlCaInP light emitting diodes (LEDs). The sheet resistance of the ITO films deposited is of the order of 4.5 Omega/rectangle with up to 90% transmission in the visible region of the spectrum. In all cases, the der ices incorporating the ITO layer gave a marginally greater output (10%) than the standard non-ITO devices.
引用
收藏
页码:2210 / 2212
页数:3
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