THIN POLYOXIDE FILMS GROWN BY RAPID THERMAL-PROCESSING

被引：7

作者：

ALVI, NS ^{[1
]}

LEE, SK ^{[1
]}

KWONG, DL ^{[1
]}

机构：

[1] UNIV TEXAS,MICROELECTR RES CTR,DEPT ELECT & COMP ENGN,AUSTIN,TX 78712

来源：

IEEE ELECTRON DEVICE LETTERS | 1987年 / 8卷 / 05期

关键词：

D O I：

10.1109/EDL.1987.26601

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：197 / 199

页数：3

相关论文

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