INTRINSIC STRESS IN CHROMIUM THIN-FILMS MEASURED BY A NOVEL METHOD

被引：35

作者：

JANDA, M

STEFAN, O

机构：

来源：

THIN SOLID FILMS | 1984年 / 112卷 / 02期

关键词：

D O I：

10.1016/0040-6090(84)90490-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：127 / 137

页数：11

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