A COMBINED X-RAY AND OPTICAL INTERFEROMETER WITH A NEW TRANSLATION STAGE

被引：6

作者：

NAKAYAMA, K

TANAKA, M

KURODA, K

机构：

[1] National Research Laboratory of Metrology, Tsukuba, Ibaraki

来源：

IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT | 1991年 / 40卷 / 02期

关键词：

D O I：

10.1109/TIM.1990.1032893

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have made a new translation stage for the measurement of the silicon (220) lattice spacing. The stage moves one of the crystals of the X-ray interferometer about 80-mu-m by a piezoelectric actuator. Mechanical vibration amplitude of the stage is small enough to observe X-ray interference signals. The visibility was 30% in the forward diffracted beam from an X-ray interferometer mounted on the stage.

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收藏

页码：108 / 109

页数：2

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