SURFACE RESTORATION OF OXYGEN-IMPLANTED SILICON

被引：8

作者：

KIM, MJ

BROWN, DM

GARFINKEL, M

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1983年 / 54卷 / 04期

关键词：

D O I：

10.1063/1.332213

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1991 / 1999

页数：9

共 32 条

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