USE OF THE DX CENTER AS A PROBE TO STUDY THE PROFILE OF SI IMPURITIES IN PLANAR-DOPED GAAS

被引:3
作者
BEZERRA, JC
DEOLIVEIRA, AG
MAZZONI, MSC
CHACHAM, H
机构
[1] Departamento de Física, Instituto de Ciências Exatas, Universidade Federal de Minas Gerais, 30161-970 Belo Horizonte
关键词
D O I
10.1063/1.358682
中图分类号
O59 [应用物理学];
学科分类号
摘要
Photo Hall concentration and mobility were measured for two molecular beam epitaxy-grown samples having a silicon planar-doped structure in the GaAs layer of a GaAs/AlGaAs heterojunction. The nominal silicon concentration for both samples was 1.5×1013 cm-2 and the distance between the ideal localization of the doped plane and the interface was adjusted to be 15 Å. The difference between the two samples is the growth direction. The Hall measurements were carried out at 77 K both in darkness and under illumination using an infrared light emitting diode as light source. Photoexcited effects indicate the presence of silicon atoms inside the undoped AlGaAs layer and that the silicon profile spreads mainly in the growth direction. Self-consistent electronic structure calculations, in the effective-mass approximations, were performed assuming doping profiles that simulate both samples. The calculations show that parallel conduction occurs when the growth direction is from GaAs to AlGaAs. This is consistent with the Hall measurements. © 1995 American Institute of Physics.
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页码:3283 / 3287
页数:5
相关论文
共 19 条
[1]   SECONDARY ION MASS-SPECTROMETRY STUDY OF OXYGEN ACCUMULATION AT GAAS ALGAAS INTERFACES GROWN BY MOLECULAR-BEAM EPITAXY [J].
ACHTNICH, T ;
BURRI, G ;
PY, MA ;
ILEGEMS, M .
APPLIED PHYSICS LETTERS, 1987, 50 (24) :1730-1732
[2]   ELECTRONIC-PROPERTIES OF TWO-DIMENSIONAL SYSTEMS [J].
ANDO, T ;
FOWLER, AB ;
STERN, F .
REVIEWS OF MODERN PHYSICS, 1982, 54 (02) :437-672
[3]   MIGRATION OF SI IN DELTA-DOPED GAAS [J].
BEALL, RB ;
CLEGG, JB ;
HARRIS, JJ .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1988, 3 (06) :612-615
[4]   OBSERVATION OF NEGATIVE PERSISTENT PHOTOCONDUCTIVITY IN AN N-CHANNEL GAAS/ALXGA1-XAS SINGLE HETEROJUNCTION [J].
CHEN, J ;
YANG, CH ;
WILSON, RA ;
YANG, MJ .
APPLIED PHYSICS LETTERS, 1992, 60 (17) :2113-2115
[5]  
de Oliveira A. G., 1994, Brazilian Journal of Physics, V24, P363
[6]   DIFFUSION AND ELECTRICAL-PROPERTIES OF SILICON-DOPED GALLIUM-ARSENIDE [J].
GREINER, ME ;
GIBBONS, JF .
JOURNAL OF APPLIED PHYSICS, 1985, 57 (12) :5181-5191
[7]   DELTA-DOPING OF GAAS AND AL0.33GA0.67AS WITH SN, SI AND BE - A COMPARATIVE-STUDY [J].
HARRIS, JJ ;
CLEGG, JB ;
BEALL, RB ;
CASTAGNE, J ;
WOODBRIDGE, K ;
ROBERTS, C .
JOURNAL OF CRYSTAL GROWTH, 1991, 111 (1-4) :239-245
[8]   SECONDARY-ION MASS-SPECTROMETRY STUDY OF THE MIGRATION OF SI IN PLANAR-DOPED GAAS AND AL0.25GA0.75AS [J].
LANZILLOTTO, AM ;
SANTOS, M ;
SHAYEGAN, M .
APPLIED PHYSICS LETTERS, 1989, 55 (14) :1445-1447
[9]  
MOONEY PM, 1990, J APPL PHYS, V61, pR1
[10]   AN INVESTIGATION OF THE DIFFUSION OF SILICON IN DELTA-DOPED GALLIUM-ARSENIDE, AS DETERMINED USING HIGH-RESOLUTION SECONDARY ION MASS-SPECTROMETRY [J].
NUTT, HC ;
SMITH, RS ;
TOWERS, M ;
REES, PK ;
JAMES, DJ .
JOURNAL OF APPLIED PHYSICS, 1991, 70 (02) :821-826