TRANSMISSION ELECTRON-MICROSCOPY STUDY OF ION-IMPLANTATION INDUCED SI AMORPHIZATION

被引：88

作者：

RUAULT, MO

CHAUMONT, J

BERNAS, H

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 209卷 / MAY期

关键词：

We are grateful to F. Lalu and M. Salom6 for considerable technical assistance in the design; setting-up and operation of the in situ TEM experiment. This work was supported by DRET (R. Lallement; J. Combasson) through grant no. 79/578;

D O I：

10.1016/0167-5087(83)90822-0

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：351 / 356

页数：6

共 17 条

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