MEASUREMENT OF BORON DIFFUSIVITY IN HYDROGENATED AMORPHOUS-SILICON BY USING NUCLEAR-REACTION B-10(N,ALPHA)LI-7

被引：17

作者：

MATSUMURA, H ^{[1
]}

SAKAI, K ^{[1
]}

MAEDA, M ^{[1
]}

FURUKAWA, S ^{[1
]}

HORIUCHI, K ^{[1
]}

机构：

[1] MUSASHI INST TECHNOL,ATOM ENERGY LAB,TAMA KU,KAWASAKI 215,JAPAN

来源：

JOURNAL OF APPLIED PHYSICS | 1983年 / 54卷 / 06期

关键词：

D O I：

10.1063/1.332464

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：3106 / 3110

页数：5

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