HIGH-RESOLUTION TRANSMISSION ELECTRON-MICROSCOPY STUDY OF SE+-IMPLANTED AND ANNEALED GAAS - MECHANISMS OF AMORPHIZATION AND RECRYSTALLIZATION

被引:43
作者
SADANA, DK [1 ]
SANDS, T [1 ]
WASHBURN, J [1 ]
机构
[1] UNIV CALIF BERKELEY LAWRENCE BERKELEY LAB,DIV MAT & MOLEC RES,BERKELEY,CA 94720
关键词
D O I
10.1063/1.94856
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:623 / 625
页数:3
相关论文
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