SELECTIVE STUDIES OF CRYSTALLINE TA2O5 FILMS

[11] SOME PROPERTIES OF CRYSTALLIZED TANTALUM PENTOXIDE THIN-FILMS ON SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1984, 55 (10) : 3715 - 3725

[12] OHTA K, ISCC 80, P66

[13] FILM-SUBSTRATE INTERACTION IN SI-TA AND SI-TA2O5 STRUCTURES [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (10) : 1514 - 1519

[14] ELECTRON TRAPPING LEVELS IN RF-SPUTTERED TA2O5 FILMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (04): : 1825 - 1830

[15] ELECTRICAL CHARACTERISTICS OF THE RF MAGNETRON-SPUTTERED TANTALUM PENTOXIDE-SILICON INTERFACE [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (11) : 2621 - 2625

[16] P-CHANNEL TFTS USING MAGNETRON-SPUTTERED TA2O5 FILMS AS GATE INSULATORS [J]. IEEE ELECTRON DEVICE LETTERS, 1984, 5 (06) : 197 - 198

[17] OPTICAL AND ELECTRICAL-PROPERTIES OF THERMAL TANTALUM OXIDE-FILMS ON SILICON [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1981, 28 (01) : 22 - 27

[18] THORNTON J, 1984, DEPOSITION TECHNOLOG

[19] 1966, ENG PROPERTIES SELEC

[11] SOME PROPERTIES OF CRYSTALLIZED TANTALUM PENTOXIDE THIN-FILMS ON SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1984, 55 (10) : 3715 - 3725

[12] OHTA K, ISCC 80, P66

[13] FILM-SUBSTRATE INTERACTION IN SI-TA AND SI-TA2O5 STRUCTURES [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (10) : 1514 - 1519

[14] ELECTRON TRAPPING LEVELS IN RF-SPUTTERED TA2O5 FILMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (04): : 1825 - 1830

[15] ELECTRICAL CHARACTERISTICS OF THE RF MAGNETRON-SPUTTERED TANTALUM PENTOXIDE-SILICON INTERFACE [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (11) : 2621 - 2625

[16] P-CHANNEL TFTS USING MAGNETRON-SPUTTERED TA2O5 FILMS AS GATE INSULATORS [J]. IEEE ELECTRON DEVICE LETTERS, 1984, 5 (06) : 197 - 198

[17] OPTICAL AND ELECTRICAL-PROPERTIES OF THERMAL TANTALUM OXIDE-FILMS ON SILICON [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1981, 28 (01) : 22 - 27

[18] THORNTON J, 1984, DEPOSITION TECHNOLOG

[19] 1966, ENG PROPERTIES SELEC