THE FABRICATION AND USE OF SILICON AND GALLIUM-ARSENIDE ION-SOURCE EXTRACTION GRIDS

被引：7

作者：

SPEIDELL, JL

HARPER, JME

CUOMO, JJ

KLEINSASSER, AW

KAUFMAN, HR

TUTTLE, AH

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 21卷 / 03期

关键词：

D O I：

10.1116/1.571830

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：824 / 827

页数：4

共 17 条

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