THE ROLE OF CARBON IN NUCLEATION OF OXYGEN PRECIPITATES IN CZ SILICON-CRYSTALS

被引：14

作者：

SHIMANUKI, Y

FURUYA, H

SUZUKI, I

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1989年 / 136卷 / 07期

关键词：

D O I：

10.1149/1.2097164

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：2058 / 2062

页数：5

共 16 条

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