FORMATION OF NUCLEI OF OXYGEN PRECIPITATES IN CZ SILICON-CRYSTALS DURING CRYSTAL-GROWTH PROCESS

被引：22

作者：

FURUYA, H ^{[1
]}

SUZUKI, I ^{[1
]}

SHIMANUKI, Y ^{[1
]}

MURAI, K ^{[1
]}

机构：

[1] JAPAN SILICON CO LTD,NODA,CHIBA 278,JAPAN

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1988年 / 135卷 / 03期

关键词：

D O I：

10.1149/1.2095710

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：677 / 682

页数：6

共 13 条

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