EFFECTS OF TRICHLOROETHYLENE-OXIDATION ON CHARACTERISTICS OF MOS DEVICES

被引：53

作者：

DECLERCK, GJ ^{[1
]}

HATTORI, T ^{[1
]}

MAY, GA ^{[1
]}

BEAUDOUIN, J ^{[1
]}

MEINDL, JD ^{[1
]}

机构：

[1] STANFORD UNIV, INTEGRATED CIRCUITS LAB, STANFORD, CA 94305 USA

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1975年 / 122卷 / 03期

关键词：

D O I：

10.1149/1.2134230

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：436 / 439

页数：4

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