STUDY OF CALCIA-STABILIZED ZIRCONIA THIN-FILM SENSORS

被引：28

作者：

CROSET, M

SCHNELL, P

VELASCO, G

SIEJKA, J

机构：

[1] THOMSON CSF,CENT RECH LAB,F-91401 ORSAY,FRANCE

[2] ECOLE NORM SUPER,PHYS SOLIDES GRP,F-75005 PARIS,FRANCE

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1977年 / 14卷 / 03期

关键词：

D O I：

10.1116/1.569266

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：777 / 781

页数：5

共 11 条

[1] 7ICROANALYSIS BY DIRECT OBSERVATION OF NUCLEAR REACTIONS USING A 2 MEV VAN-DE-GRAAFF [J].

AMSEL, G ;

NADAI, JP ;

DARTEMAR.E ;

DAVID, D ;

GIRARD, E ;

MOULIN, J .

NUCLEAR INSTRUMENTS & METHODS, 1971, 92 (04) :481-&

[2] GROWTH KINETICS OBSERVED IN FORMATION OF METAL SILICIDES ON SILICON [J].

BOWER, RW ;

MAYER, JW .

APPLIED PHYSICS LETTERS, 1972, 20 (09) :359-&

[3] PRINCIPLES AND APPLICATIONS OF ION-BEAM TECHNIQUES FOR ANALYSIS OF SOLIDS AND THIN-FILMS [J].

CHU, WK ;

MAYER, JW ;

NICOLET, MA ;

BUCK, TM ;

AMSEL, G ;

EISEN, F .

THIN SOLID FILMS, 1973, 17 (01) :1-41

[4] COMPOSITION, STRUCTURE, AND AC CONDUCTIVITY OF RF-SPUTTERED CALCIA-STABILIZED ZIRCONIA THIN-FILMS [J].

CROSET, M ;

SCHNELL, JP ;

VELASCO, G ;

SIEJKA, J .

JOURNAL OF APPLIED PHYSICS, 1977, 48 (02) :775-780

[5]

CROSET M, 1975, ELECTRODE PROCESSES

[6]

CROSET M, 1976, RCP157 CNRS RAPP SCI, P13

[7] MORPHOLOGICAL AND ELECTRICAL PROPERTIES OF RF SPUTTERED Y2O3-DOPED ZRO2 THIN-FILMS [J].

GREENE, JE ;

WICKERSHAM, CE ;

ZILKO, JL ;

WELSH, LB ;

SZOFRAN, FR .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (01) :72-75

[8]

MAISSEL LI, 1970, HDB THIN FILM TECHNO, pCH12

[9]

MASKALICK NJ, 1966, ELECTROCHEMICAL SOC, V11, P17

[10] ANALYSIS OF THIN-FILM STRUCTURES WITH NUCLEAR BACKSCATTERING AND X-RAY-DIFFRACTION [J].

MAYER, JW ;

TU, KN .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (01) :86-93

← 1 2 →