THIN-FILMS OF HYDROGENATED AMORPHOUS-CARBON PREPARED BY RF PLASMA DECOMPOSITION OF METHANE

被引：7

作者：

PRINCE, ET ^{[1
]}

ROMACH, MM ^{[1
]}

机构：

[1] EASTMAN KODAK CO,USAD RES LAB,ROCHESTER,NY 14650

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 03期

关键词：

D O I：

10.1116/1.573287

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：694 / 695

页数：2

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[6]

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[7] STRUCTURAL INVESTIGATION OF THIN-FILMS OF DIAMONDLIKE CARBON [J].

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