ANOMALOUS FREQUENCY DISPERSION OF MOS CAPACITORS FORMED ON N-TYPE GAAS BY ANODIC-OXIDATION

被引:55
作者
SAWADA, T [1 ]
HASEGAWA, H [1 ]
机构
[1] HOKKAIDO UNIV,FAC ENGN,DEPT ELECT ENGN,SAPPORO 060,JAPAN
关键词
D O I
10.1049/el:19760358
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:471 / 472
页数:2
相关论文
共 8 条
[1]   FIRST ANODIC-OXIDE GAAS MOSFETS BASED ON EASY TECHNOLOGICAL PROCESSES [J].
BAYRAKTAROGLU, B ;
KOHN, E ;
HARTNAGEL, HL .
ELECTRONICS LETTERS, 1976, 12 (02) :53-54
[2]   AUTOMATIC C-V PLOTTER [J].
FORWARD, KE ;
HASEGAWA, H ;
HARTNAGEL, HL .
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1975, 8 (06) :487-489
[3]   ANODIC-OXIDATION OF GAAS IN MIXED SOLUTIONS OF GLYCOL AND WATER [J].
HASEGAWA, H ;
HARTNAGEL, HL .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (05) :713-723
[4]   NEW ANODIC NATIVE OXIDE OF GAAS WITH IMPROVED DIELECTRIC AND INTERFACE PROPERTIES [J].
HASEGAWA, H ;
FORWARD, KE ;
HARTNAGEL, HL .
APPLIED PHYSICS LETTERS, 1975, 26 (10) :567-569
[5]   IMPROVED METHOD OF ANODIC-OXIDATION OF GAAS [J].
HASEGAWA, H ;
FORWARD, KE ;
HARTNAGEL, HL .
ELECTRONICS LETTERS, 1975, 11 (03) :53-54
[6]   C-V CHARACTERISTICS OF GAP MOS DIODE WITH ANODIC OXIDE FILM [J].
IKOMA, T ;
YOKOMIZO, H .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1976, 23 (05) :521-523
[7]  
MIYAZAKI T, 1974, JPN J APPL PHYS, P441