ENERGY-DISTRIBUTION OF ION-BEAM FROM VARIOUS LIQUID-METAL ION SOURCES

[1] EMISSION CHARACTERISTICS OF AU-SI-BE LM ION-SOURCE [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1985, 24 (05): : L288 - L290

[2] FORMATION OF SUB-MICRON ISOLATION IN GAAS BY IMPLANTING A FOCUSED BORON ION-BEAM EMITTED FROM A PD-NI-SI-BE-B LM ION-SOURCE [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (01): : 54 - 57

[3] DIXON A, 1981, SURF SCI, V108, pL424, DOI 10.1016/0039-6028(81)90351-4

[4] ENERGY SPREAD OF METAL-IONS DRAWN FROM THEIR LIQUID [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1979, 12 (06) : L77 - L80

[5] CHARACTERISTICS OF BE-SI-AU TERNARY ALLOY LIQUID-METAL ION SOURCES [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1983, 22 (11): : L692 - L694

[6] Komuro M., 1983, Proceedings of the International Ion Engineering Congress. The 7th Symposium (1983 International) on Ion Sources and Ion Assisted Technology (ISIAT '83) and the 4th International Conference on Ion and Plasma Assisted Techniques (IPAT '83), P337

[7] OPTICAL-EMISSION FROM GA IONIZATION AT A FIELD EMITTER [J]. APPLIED PHYSICS LETTERS, 1980, 36 (12) : 957 - 959

[8] BEAM-ENERGY DISTRIBUTION MEASUREMENTS OF LIQUID GALLIUM FIELD-ION SOURCES [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1983, 16 (10) : L209 - L213

[9] MASKLESS ION-IMPLANTATION SYSTEM FOR 3-DIMENSIONAL FINE DOPING STRUCTURES IN III-V COMPOUND SEMICONDUCTORS [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 21 (2-4) : 104 - 111

[10] FIELD-ION MICROSCOPY OF LIQUID-METAL GALLIUM [J]. APPLIED PHYSICS LETTERS, 1979, 34 (01) : 11 - 13

[1] EMISSION CHARACTERISTICS OF AU-SI-BE LM ION-SOURCE [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1985, 24 (05): : L288 - L290

[2] FORMATION OF SUB-MICRON ISOLATION IN GAAS BY IMPLANTING A FOCUSED BORON ION-BEAM EMITTED FROM A PD-NI-SI-BE-B LM ION-SOURCE [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (01): : 54 - 57

[3] DIXON A, 1981, SURF SCI, V108, pL424, DOI 10.1016/0039-6028(81)90351-4

[4] ENERGY SPREAD OF METAL-IONS DRAWN FROM THEIR LIQUID [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1979, 12 (06) : L77 - L80

[5] CHARACTERISTICS OF BE-SI-AU TERNARY ALLOY LIQUID-METAL ION SOURCES [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1983, 22 (11): : L692 - L694

[6] Komuro M., 1983, Proceedings of the International Ion Engineering Congress. The 7th Symposium (1983 International) on Ion Sources and Ion Assisted Technology (ISIAT '83) and the 4th International Conference on Ion and Plasma Assisted Techniques (IPAT '83), P337

[7] OPTICAL-EMISSION FROM GA IONIZATION AT A FIELD EMITTER [J]. APPLIED PHYSICS LETTERS, 1980, 36 (12) : 957 - 959

[8] BEAM-ENERGY DISTRIBUTION MEASUREMENTS OF LIQUID GALLIUM FIELD-ION SOURCES [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1983, 16 (10) : L209 - L213

[9] MASKLESS ION-IMPLANTATION SYSTEM FOR 3-DIMENSIONAL FINE DOPING STRUCTURES IN III-V COMPOUND SEMICONDUCTORS [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 21 (2-4) : 104 - 111

[10] FIELD-ION MICROSCOPY OF LIQUID-METAL GALLIUM [J]. APPLIED PHYSICS LETTERS, 1979, 34 (01) : 11 - 13