A QUANTUM CHEMICAL STUDY OF CHLORINE DESORPTION BY HYDROGEN IN THE VPE OF GAAS

被引:24
作者
SEIFERT, W
SCHWETLICK, S
REINHOLD, J
BUTTER, E
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关键词
D O I
10.1016/0022-0248(84)90216-1
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
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页码:333 / 337
页数:5
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