VOLTAGE SHIFTS OF FOWLER-NORDHEIM TUNNELING J-V PLOTS IN THIN GATE OXIDE MOS STRUCTURES DUE TO TRAPPED CHARGES

被引:31
作者
OH, SJ
YEOW, YT
机构
关键词
D O I
10.1016/0038-1101(89)90035-X
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:507 / 511
页数:5
相关论文
共 13 条
[1]   DETERMINATION OF INSULATOR BULK TRAPPED CHARGE-DENSITIES AND CENTROIDS FROM PHOTOCURRENT-VOLTAGE CHARACTERISTICS OF MOS STRUCTURES [J].
DIMARIA, DJ .
JOURNAL OF APPLIED PHYSICS, 1976, 47 (09) :4073-4077
[2]  
EUZENT B, 1981, IEEE P IRPS, P11
[3]  
FROMHOLD AT, 1981, QUANTUM MECHANICS AP, pCH4
[5]  
JENQ C, 1981, INT ELECTRON DEVICES, P388
[6]   EFFECT OF SUBSTRATE GENERATION CURRENT ON OXIDE IV MEASUREMENT ON P-TYPE MOS STRUCTURES [J].
LEE, HS .
SOLID-STATE ELECTRONICS, 1979, 22 (04) :385-389
[7]   FOWLER-NORDHEIM TUNNELING INTO THERMALLY GROWN SIO2 [J].
LENZLINGER, M ;
SNOW, EH .
JOURNAL OF APPLIED PHYSICS, 1969, 40 (01) :278-+
[8]  
Liang M., 1981, INT EL DEV M INT EL DEV M, P396
[9]   CREATION AND TERMINATION OF SUBSTRATE DEEP DEPLETION IN THIN OXIDE MOS CAPACITORS BY CHARGE TUNNELING [J].
LIANG, MS ;
CHANG, C ;
YEOW, YT ;
HU, C ;
BRODERSEN, RW .
IEEE ELECTRON DEVICE LETTERS, 1983, 4 (10) :350-352
[10]   HIGH-FIELD AND CURRENT-INDUCED POSITIVE CHARGE IN THERMAL SIO2 LAYERS [J].
NISSANCOHEN, Y ;
SHAPPIR, J ;
FROHMANBENTCHKOWSKY, D .
JOURNAL OF APPLIED PHYSICS, 1985, 57 (08) :2830-2839