POSITIVE AND NEGATIVE CHARGING OF THERMALLY GROWN SIO2 INDUCED BY FOWLER-NORDHEIM EMISSION

被引：54

作者：

ITSUMI, M

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1981年 / 52卷 / 05期

关键词：

D O I：

10.1063/1.329126

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：3491 / 3497

页数：7

相关论文

共 25 条

[1] HOT-CARRIER INSTABILITY IN IGFETS
ABBAS, SA
DOCKERTY, RC
[J]. APPLIED PHYSICS LETTERS, 1975, 27 (03) : 147 - 148
[2] ELECTRON TRAPPING BY RADIATION-INDUCED CHARGE IN MOS DEVICES
AITKEN, JM
YOUNG, DR
[J]. JOURNAL OF APPLIED PHYSICS, 1976, 47 (03) : 1196 - 1198
[3] TRAPPING EFFECTS IN IRRADIATED AND AVALANCHE-INJECTED MOS CAPACITORS
BAKOWSKI, M
COCKRUM, RH
ZAMANI, N
MASERJIAN, J
VISWANATHAN, CR
[J]. IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1978, 25 (06) : 1233 - 1238
[4] LOCATION OF POSITIVE CHARGES IN SIO2-FILMS ON SI GENERATED BY VUV PHOTONS, X-RAYS, AND HIGH-FIELD STRESSING
DIMARIA, DJ
WEINBERG, ZA
AITKEN, JM
[J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (03) : 898 - 906
[5] CHARGE TRAPPING STUDIES IN SIO2 USING HIGH-CURRENT INJECTION FROM SI-RICH SIO2-FILMS
DIMARIA, DJ
GHEZ, R
DONG, DW
[J]. JOURNAL OF APPLIED PHYSICS, 1980, 51 (09) : 4830 - 4841
[6] EFFECTS OF PROCESSING ON HOT-ELECTRON TRAPPING IN SIO2
GDULA, RA
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (01) : 42 - 47
[7] FOWLER-NORDHEIM TUNNELING INTO THERMALLY GROWN SIO2
LENZLINGER, M
SNOW, EH
[J]. JOURNAL OF APPLIED PHYSICS, 1969, 40 (01) : 278 - +
[8] CARRIER INJECTION INTO SIO2 FROM SI SURFACE DRIVEN TO AVALANCHE BREAKDOWN BY A LINEAR RAMP PULSE, AND TRAPPING, DISTRIBUTION AND THERMAL ANNEALING OF INJECTED HOLES IN SIO2
NAGAI, K
HAYASHI, Y
TARUI, Y
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1975, 14 (10) : 1539 - 1545
[9] SURFACE STATE GENERATION IN MOS STRUCTURE BY APPLYING HIGH-FIELD TO SIO2 FILM
NAKAGIRI, M
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1974, 13 (10) : 1610 - 1617
[10] I-V CHARACTERISTICS OF MOS CAPACITORS WITH POLYCRYSTALLINE SILICON FIELD PLATES
NEUGEBAUER, CA
BURGESS, JF
JOYNSON, RE
MUNDY, JL
[J]. JOURNAL OF APPLIED PHYSICS, 1972, 43 (12) : 5041 - 5044