共 36 条
- [2] HIGH-RATE PLANAR MAGNETRON DEPOSITION OF TRANSPARENT, CONDUCTING, AND HEAT REFLECTING FILMS ON GLASS AND PLASTIC [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02): : 352 - 355
- [3] CARTER G, 1968, ION BOMBARDMENT SOLI, pCH6
- [4] Chapman B., 1980, GLOW DISCHARGE PROCE
- [5] COAD J, 1979, ION PLATING ALLIED T, P186
- [7] INFLUENCE OF SPUTTERING PARAMETERS ON COMPOSITION OF MULTICOMPONENT FILMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01): : 79 - 83
- [8] SIGNIFICANCE OF NEGATIVE-ION FORMATION IN SPUTTERING AND SIMS ANALYSIS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (02): : 281 - 287
- [10] STEADY-STATE MASS BALANCE APPROACH TO SUBSTRATE BIASED RF SPUTTERING [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (04): : 965 - 968