STOICHIOMETRY CONTROL MECHANISMS FOR BIAS-SPUTTERED ZINC-OXIDE THIN-FILMS

被引:18
作者
BRETT, MJ
PARSONS, RR
机构
关键词
D O I
10.1139/p85-132
中图分类号
O4 [物理学];
学科分类号
0702 ;
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页码:819 / 825
页数:7
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