ION-BEAM ETCHING AND SURFACE CHARACTERIZATION OF INDIUM-PHOSPHIDE

被引：23

作者：

BOUADMA, N

DEVOLDERE, P

JUSSERAND, B

OSSART, P

机构：

来源：

APPLIED PHYSICS LETTERS | 1986年 / 48卷 / 19期

关键词：

D O I：

10.1063/1.97005

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：1285 / 1287

页数：3

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