ISOTOPIC TRACER STUDIES OF OXYGEN-TRANSPORT THROUGH SIO2-FILMS AT 1000-DEGREES-C USING SECONDARY ION MASS-SPECTROMETRY

被引：29

作者：

HAN, CJ

HELMS, CR

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 59卷 / 05期

关键词：

D O I：

10.1063/1.337028

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：1767 / 1769

页数：3

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