LOW-TEMPERATURE OXIDATION OF SILICON (111) 7X7 SURFACES

被引:104
作者
SCHELLSOROKIN, AJ
DEMUTH, JE
机构
关键词
D O I
10.1016/0039-6028(85)90673-9
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
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页码:273 / 296
页数:24
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