LOW-TEMPERATURE OXIDATION OF SILICON (111) 7X7 SURFACES

被引：104

作者：

SCHELLSOROKIN, AJ

DEMUTH, JE

机构：

来源：

关键词：

D O I：

10.1016/0039-6028(85)90673-9

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：273 / 296

页数：24

共 87 条

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